Biographical Sketch for Devin K

Devin K. Brown

Senior Research Engineer, Institute for Electronics and Nanotechnology

Georgia Institute of Technology

1. 
   Professional Preparation
   

Institution Location Major Degree Year

Georgia Inst. of Technology Atlanta, GA Elec. Eng. B.S. 1993

Georgia Inst. of Technology Atlanta, GA Elec. Eng. M.S. 1995

2. 
   Appointments
   

since 2002 Senior Research Engineer, Microelectronics Research Center, Georgia Institute of Technology, Atlanta, Georgia

1999-2002 Senior Device Engineer, D1B/F20, D1C, Portland Technology Development, Intel Corporation, Hillsboro, Oregon

1997-1998 Device Engineer, Fab 15, Technology Manufacturing Group, Intel Corporation, Aloha, Oregon

1997-1998 Adjunct Faculty, Microelectronics Program, Portland Community College, Hillsboro, Oregon

1995-1997 Ion Implant Process Engineer, Fab 5, Technology Manufacturing Group, Intel Corporation, Aloha, Oregon

3. 
   Products
   

PRODUCTS MOST CLOSELY RELATED

1. 
   O. J. Hildreth, D. Brown, and C. P. Wong, "3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon," Advanced Functional Materials, vol. 21, pp. 3119-3128, Aug 23 2011.
   
2. 
   N. R. Devlin and D. K. Brown, "Fabricating millimeter to nanometer sized cavities concurrently for nanofluidic devices," Journal of Vacuum Science & Technology B, vol. 28, pp. C6i7-C6i10, Nov 2010.
   
3. 
   D. K. Brown, "Direct patterning of plasma enhanced chemical vapor deposition silicon dioxide by electron beam lithography," Journal of Vacuum Science & Technology B, vol. 26, pp. 2451-2454, Nov 2008.
   
4. 
   D. K. Brown, "Deep ultraviolet photolithography capability of ZEP520A electron beam resist for mix and match lithography," Journal of Vacuum Science & Technology B, vol. 25, pp. 2447-2450, Nov 2007.
   
5. 
   R. Murali, D. K. Brown, K. P. Martin, and J. D. Meindl, "Process optimization and proximity effect correction for gray scale e-beam lithography," Journal of Vacuum Science & Technology B, vol. 24, pp. 2936-2939, Nov-Dec 2006.
   

OTHER SIGNIFICANT PRODUCTS

1. 
   I. Bisotto, E. S. Kannan, J.-C. Portal, D. K. Brown, T. J. Beck, Y. Krupko, et al., "Ratchet effect study in Si/SiGe heterostructures in the presence of asymmetrical antidots for different polarizations of microwaves," Science and Technology of Advanced Materials, vol. 15, p. 045005, 28 July 2014 2014.
   
2. 
   P. A. Thadesar, A. Dembla, D. Brown, and M. S. Bakir, "Novel through-silicon via technologies for 3D system integration," in Interconnect Technology Conference (IITC), 2013 IEEE International, 2013, pp. 1-3.
   
3. 
   J. A. Davis, D. K. Brown, and W. Henderson, "Fractal Electrode Formation in Metal-Insulator Composites Near the Percolation Threshold," IEEE Transactions on Nanotechnology, vol. 12, pp. 725-733, Sep 2013.
   
4. 
   J. Blair, D. Brown, V. A. Tamma, W. Park, and C. Summers, "Challenges in the fabrication of an optical frequency ground plane cloak consisting of silicon nanorod arrays," Journal of Vacuum Science & Technology B, vol. 28, pp. 1222-1230, Nov 2010.
   
5. 
   R. Murali, D. Brown, K. P. Martin, and J. D. Meindl, "Improving electron beam resist sensitivity by preexposure to deep ultraviolet radiation," Journal of Vacuum Science & Technology B, vol. 25, pp. 2064-2067, Nov 2007.
   

4. 
   Synergistic Activities
   

2010-2016 Program Committee for Electron, Ion, Photon Beam and Nanofabrication Conference

2011-2012 Reviewer for Journal of Vacuum Science Technology B

2008-2012 Proposal Reviewer for Center for Functional Nanomaterials, Brookhaven National Laboratory

2010 Review Panelist for National Science Foundation SBIR Program Phase I and II

5. 
   Collaborators & Other Affiliations
   

Collaborators and Co-Editors:

Muhannad Bakir (Georgia Tech), Isabelle Bisotto (LNCMI/INSA, France), John Blair (IBM), Jeff Davis (Georgia Tech), Nicole Devlin (Argonne National Lab), Walter Henderson (Georgia Tech), Owen Hildreth (Arizona State Univ.), Jean-Claude Portal (LNCMI/INSA, France), Chris Summers (Georgia Tech), Parag Thadesar (Qualcomm), C.P. Wong (CU, Hong Kong) (total number: 11)

Graduate and Thesis Advisor:

Oliver Brand (Georgia Tech) (total number: 1)

Graduate Students Advised:

None
Postdoctoral Scholars Sponsored:

None