Table of Contens

Prerequisites: Fundamentals of physics

Evaluation: Written examination

Total number of hours: 22.5h (3 ECTS)

18. 
    P207: MEMS-NEMS
    

Main professor: Dr. Louis Renaud (University of Lyon 1)

Dr. Louis Renaud

Objectives: The aim of this course is to present the MEMS and NEMS fundamentals, technologies and applications. A part is dedicated to microfluidics.

Outline (with number of hours per part)	Lect	PSS	LW
MEMS-NEMS MEMS origins, market and current trends. Why MEMS technology? Silicon based MEMS Sensing and actuation principles. MEMS applications. MEMS Fabrication techniques and processes. MEMS design, simulation (Finite Element Analysis) and characterization. Scaling Laws in the Micro and Nano domains. New phenomena. Problem of Sensing at the nanoscale. Microfluidics What append for fluids when the size is reduced? Microfluidics technologies Electrokinetics (electroosmotic and electrophoresis) Two-phase flows Examples of Lab-On-Chips	10 5	5 2.5