Native-oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy



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Limitations of the FEM models

All the simulations presented in this work consider heat diffusion with reduced thermal conductivity in the silicon membrane. An improved step, beyond the scope of this paper, would be to include fully the ballistic transport within the membrane.
References

  1. S. Lefèvre and S. Volz, Rev. Sci. Instrum, 76, 3 (2005).

  2. J. Bodzenta, J. Juszczyk, A. Kaźmierczak-Bałata, P. Firek, A. Fleming and M. Chirtoc, Int. J. Thermophys., 37, 10 (2016).

  3. S. Lefèvre, S. Volz, J.-B. Saulnier, C. Fuentes and N. Trannoy, Rev. Sci. Instrum., 74, 4 (2003).

  4. K. Kim, W. Jeong, W. Lee, S. Sadat, D. Thompson, E. Meyhofer and P. Reddy, Appl. Phys. Lett., 105, 20 (2014).

  5. Y. Zhang, E. E. Castillo, R. J. Mehta, G. Ramanath and T. Borca-Tasciuc, Rev. Sci. Instrum., 82, 2 (2011).

  6. A.M. Massoud, J.-M. Bluet, P-O. Chapuis, Air contribution in calibrated microprobe based scanning thermal microscopy, submitted (2017).

  7. L. Shi and A. Majumdar, J. Heat Transf., 124, 329–337 (2002).




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